diff --git a/fastdeploy/worker/xpu_memory_monitor.py b/fastdeploy/worker/xpu_memory_monitor.py
new file mode 100644
index 00000000000..2af7a711404
--- /dev/null
+++ b/fastdeploy/worker/xpu_memory_monitor.py
@@ -0,0 +1,96 @@
+import atexit
+import logging
+import os
+import threading
+import time
+from datetime import datetime
+
+from fastdeploy.model_executor.ops.xpu import (
+    xpu_get_free_global_memory,
+    xpu_get_total_global_memory,
+    xpu_get_used_global_memory,
+)
+
+
+class XpuMemoryMonitor:
+    """
+    Independent XPU memory monitor that only writes to a separate log file.
+
+    Args:
+        device_ids (list[int]): List of device ids to monitor.
+        log_path (str): Log file path. Defaults to './default.xpu.log'.
+        interval (float): Logging interval in seconds. Defaults to 5.
+    """
+
+    def __init__(self, device_ids, log_path="./log/default.xpu.log", interval=5):
+        self.device_ids = [int(d) for d in device_ids]
+        self.log_path = log_path
+        self.interval = interval
+        self.stop_flag = False
+        self.thread = None
+
+        self.logger = logging.getLogger("XPU_Monitor")
+        self.logger.setLevel(logging.INFO)
+        ch = logging.StreamHandler()
+        ch.setLevel(logging.INFO)
+        formatter = logging.Formatter("[%(asctime)s] %(levelname)s: %(message)s")
+        ch.setFormatter(formatter)
+        self.logger.addHandler(ch)
+
+        os.makedirs(os.path.dirname(self.log_path), exist_ok=True)
+
+        if not os.path.exists(self.log_path):
+            with open(self.log_path, "w") as f:
+                f.write("index,utilization_gpu,memory_total,memory_used,memory_free,timestamp\n")
+
+        atexit.register(self.stop)
+
+    def _to_number(self, x):
+        """Safely convert tensor or other types to float."""
+        try:
+            if hasattr(x, "item"):
+                return float(x.item())
+            elif hasattr(x, "__float__"):
+                return float(x)
+            elif hasattr(x, "__array__"):
+                import numpy as np
+
+                return float(np.array(x).flatten()[0])
+            else:
+                return float(x)
+        except Exception:
+            return 0.0
+
+    def _monitor_loop(self):
+        """Background thread function for periodic XPU memory monitoring."""
+        while not self.stop_flag:
+            ts = datetime.now().strftime("%Y-%m-%d %H:%M:%S")
+            for device_id in self.device_ids:
+                try:
+                    total = self._to_number(xpu_get_total_global_memory(device_id)) / 1024**2
+                    used = self._to_number(xpu_get_used_global_memory(device_id)) / 1024**2
+                    free = self._to_number(xpu_get_free_global_memory(device_id)) / 1024**2
+                    util = int((used / total) * 100) if total > 0 else 0
+
+                    line = f"{device_id},{util},{int(total)},{int(used)},{int(free)},{ts}\n"
+                    with open(self.log_path, "a") as f:
+                        f.write(line)
+                except Exception:
+                    with open(self.log_path, "a") as f:
+                        f.write(f"{device_id},error,0,0,0,{ts}\n")
+            time.sleep(self.interval)
+
+    def start(self):
+        """Start monitoring in a background daemon thread."""
+        if self.thread and self.thread.is_alive():
+            return
+        self.stop_flag = False
+        self.thread = threading.Thread(target=self._monitor_loop, daemon=True)
+        self.thread.start()
+
+    def stop(self):
+        """Stop the monitoring thread."""
+        if getattr(self, "stop_flag", False) is False:
+            self.stop_flag = True
+            if self.thread and self.thread.is_alive():
+                self.thread.join(timeout=1)
diff --git a/fastdeploy/worker/xpu_worker.py b/fastdeploy/worker/xpu_worker.py
index 0f84b1db086..f213d56bc1f 100644
--- a/fastdeploy/worker/xpu_worker.py
+++ b/fastdeploy/worker/xpu_worker.py
@@ -27,6 +27,7 @@
 from fastdeploy.utils import get_logger, set_random_seed
 from fastdeploy.worker.output import ModelRunnerOutput
 from fastdeploy.worker.worker_base import WorkerBase
+from fastdeploy.worker.xpu_memory_monitor import XpuMemoryMonitor
 from fastdeploy.worker.xpu_model_runner import XPUModelRunner
 
 logger = get_logger("xpu_worker", "xpu_worker.log")
@@ -67,6 +68,8 @@ def init_device(self):
 
             gc.collect()
             paddle.device.xpu.empty_cache()
+            self.monitor = XpuMemoryMonitor(device_ids=self.device_ids)
+            self.monitor.start()
         else:
             raise RuntimeError(f"Not support device type: {self.device_config.device}")